F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal StdPbc-0725 but are not limited to:

but are not limited to:

port converters and other components for 1

05% inhibitors)

本文書の目的は，半導体産業で使用されるトリメチルホスフィンに対する要求条件を標準化し，またこれらのスタンダードをサポートする試験手順を標準化することである。試験方法は，統計的に有効な結果を示している。

F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal StdPbc-0725 but are not limited to:This Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment. Since EFFU is an assembly of particle filter, fan, and motor, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for particle filters is not suitable to evaluate EFFU particle removal performance. This Test Method defines an evaluation